Laser Scan Lenses, f-theta lenses, scanning lenses

Model	WD mm	Scan area (mm)		Spot size (centre) µm	Spot size (off axis) µm	EP (mm)	Scan angle (º)	FD mm
Model	WD mm	Rectangular	Round	Spot size (centre) µm	Spot size (off axis) µm	EP (mm)	Scan angle (º)	FD mm
STC-40	95	36×36	51	115	135	11	20	27
STC-80	118	80×80	113	120	140	11	27	16
STC-110	145	110×110	156	210	225	16	30	17
STC-125	188	125×125	177	235	285	16	30	17
STC-175	257	175×175	247	245	300	16	30	18
STC-200	294	200×200	283	320	365	16	30	19
STC-250	360	250×250	354	330	375	16	30	20
STC-300	433	300×300	424	385	430	16	30	20
STC-350	502	350×350	495	400	450	16	30	20
STC-400	569	400×400	566	420	485	16	30	20
STC-500	803	500×500	718	460	520	16	30	21
STC-700	960	700×700	990	530	680	16	30	21

Standard ƒ-Theta Lenses for CO2 10.6μm (Flat field type - 2 element version)

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-9102/181

100.00

25.00

87.00

61x61

10.00

18.50

47.00

90.00

M85x1

65.00

STS-9160/181

159.90

25.00

142.00

100x100

12.00

18.50

47.00

90.00

M85x1

160.00

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Telecentric ƒ-Theta Lenses for CO2 10.6μm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-9105/181

106.00

20.00

72.00

50x50

10.00

37.37

66.00

120.00

M85x1

131.40

STS-9260/181

158.80

18.00

98.00

69x69

12.00

37.37

124.50

130.00

M85x1

227.30

STU2 Series Mounted 2-element F-theta Lenses

These doublet (STU2) and triplet scanning (STU3) lenses are intended to work with the same configuration of scanning mirrors and beam sizes as the STSL single-element lenses, but are offered at the shorter focal lengths where better performance is possible. The doublets have focal lengths from 75 to 300mm. Above 300mm the benefits of using a doublet are not great. The triplets are offered in two focal lengths, 75 and 100mm. These give diffraction limited performance and even further improvement over the corresponding doublet.

All the lenses are made from laser grade ZnSe. Each of the lenses comes in a black anodized aluminium mount and can also be fitted with a ZnSe protection window as an option.

Specifications:

Material:	All elements and protection window made from Laser Grade ZnSe.
Mount details:	See Figure 10.51.
Beam diameter:	Up to 15mm (12mm 1/e2)
Optical scan field:	+/-20° in X and Y.
Focal length:	Within 1%.
Absorption:	< 0.25% per element.
Transmission:	> 99.6% per element coated AR/AR for 10.6mm.
Damage threshold:	CW 3000W/mm at 10.6mm.

Part no	Field size (mm sq)	Focal length (mm)	Average focused spot dia (mm)	Standard deviation of spot dia (mm)	Working distance, WD no window(mm)	Working distance, WD with window(mm)	Max. Fq error X axis(%)	Max. Fq error Y axis(%)
STU2-10.6-50-75	50	75.0	118	25	60.27	62.03	-2.4	-2.4
STU2-10.6-70-100	70	100.0	139	22	87.57	89.34	-1.5	-1.4
STU2-10.6-105-151	105	151.4	171	0	149.06	150.84	0.9	0.9
STU2-10.6-140-200	140	200.0	225	0	213.94	215.73	1	1
STU2-10.6-175-250	175	250.0	282	0	261.36	263.17	1.3	1.3
STU2-10.6-210-300	210	300.0	338	0	312.06	313.87	1.5	1.5

(4) F-theta scan lenses for CO₂ laser - Triple element made of ZnSe

Part No.	Wave-length (um)	EFL(mm)	WD (mm)	Mirror Scanning angle	Scanning area(mm²)	Entrance beam size (mm)	Mirrors separation (a2-a1) (mm)	Last mirror to first lens(a1) (mm)	Focused spot size (um)	Connection thread	Total length(mm)
SL3-9.4-50-80W	9.4	80	89.4	+/- 25۫	50X50	14	18	18	84.5	M85X1	39.20
SL3-9.4-60-105Z	9.4	105	60.1	+/- 25۫	60X60	14	18	21	88.5	M85X1	86
SL3-10.6-50-80W	10.6	80	89.4	+/- 25۫	50X50	14	18	18	84.5	M85X1	39.20
SL3-10.6-60-105Z	10.6	105	60.1	+/- 25۫	60X60	14	18	21	88.5	M85X1	86

STU3 Series Scan Lenses

focal lengths 75 and 100mm respectively
the 75mm focal length lens is also nearly telecentric (see below) with the focused beam less than 5° to the normal diffraction limited performance over the entire image plane
virtually zero F-theta error
can be fitted with a protective window

Part No.	Wavelength (um)	EFL (mm)	Scan area (mm)	Entrance (mm)	Spot dia. (mm)
STU3-10.6-50-75	10.6	75	50x50	15	89
STU3-10.6-70-100	10.6	100	70x70	15	113

YAG Laser Scan Lenses (f-theta Lenses)

(Reference: Basics of Scan Lens)


Scan lens	Three-element lens

Fig. 1 Fig. 2

Fig. 3 Fig. 4

Fig. 5 Fig. 6

Description of part Number: STY-xxxx-yyy-zzz-A

STY--- STY series YAG laser f-theta lenses

xxxx-- laser wavelength, 1064 means 1064nm, 10.6 means 10.6um.

yyy---- mark field, yyy x yyy mm

zzz---- effective focal length in mm

A------ others

(1) 1064nm Scan Lenses

Model	F.L. mm	WD mm	Scan area mm	Scan Angle θmax	E.P. mm	Spot µm	D1 mm	D2 mm	Screw	Outline	Protective glass dia. mm
STY-1064-35-63	63	58	Φ50/35x35	±22º	12	10	31	90	M85×1	Fig.1	75
STY-1064-50-80	80	91.6	Φ70/50×50	±22º	12	12	31	90	M85×1	Fig.1	75
STY-1064-55-80	80	83	Φ78/55×55	±25º	20	15	42	90	M85×1	Fig.1	80
STY-1064-62-100	100	107	Φ87/62×62	±25º	12	14	33	90	M85×1	Fig.1	75
STY-1064-70-100-B	100	107	Φ100/70×70	±28º	16	10	40	90	M85×1	Fig.1	80
STY-1064-85-130	130	145	Φ120/85×85	±25º	12	14	35	90	M85×1	Fig.1	75
STY-1064-102-150	150	165	Φ144/102×102	±28º	12	18	36	90	M85x1	Fig.1	75
STY-1064-110-160	160	180	Φ155/110×110	±28º	12	18	36	90	M85×1	Fig.1	75
STY-1064-110-160-B	160	180	Φ155/110×110	±28	16	18	40	90	M85×1	Fig.1	80
STY-1064-110-160-C	160	180	Φ155/110×110	±28	20	18	52	120	M85×1	Fig.2	113
STY-1064-117-170	170	191	Φ165/117×117	±28º	16	18	38	90	M85×1	Fig.1	80
STY-1064-130-188	188	212	Φ185/130×130	±28º	12	18	36	90	M85×1	Fig.1	75
STY-1064-145-210-B	210	225.8	Φ205/145×145	±28º	16	18	36	90	M85×1	Fig.1	80
STY-1064-155-210	210	236	155x155	±30º	16	18	36	90	M85×1	Fig.1	80
STY-1064-153-220	220	259	153x153	±28º	12	18	36	90	M85×1	Fig.1	75
STY-1064-175-254-B	254	277.7	Φ245/1751×75	±28º	15	20	36	90	M85×1	Fig.1	75
STY-1064-175-254-C	254	274	Φ245/175×175	±28º	20	20	52	120	M85×1	Fig.2	113
STY-1064-205-290	290	327	Φ290/205×205	±28º	16	20	38	90	M85×1	Fig.1	80
STY-1064-230-330	330	363	Φ330/230×230	±28º	16	20	38	90	M85×1	Fig.1	80
STY-1064-230-330-B	330	398	Φ330/230×230	±28º	15	20	38	90	M85×1	Fig.1	75
STY-1064-255-370	370	430	Φ360/255×255	±28º	20	20	52	120	M85×1	Fig.2	113
STY-1064-255-380	380	420	Φ360/255×255	±28º	15	20	38	90	M85×1	Fig.1	75
STY-1064-286-420	420	456	Φ405/286×286	±28º	20	20	52	120	M85×1	Fig.2	113
STY-1064-300-430	430	477	Φ425/300×300	±28º	20	20	52	120	M85×1	Fig.2	113
STY-1064-300-430-B	430	495	Φ425/300×300	±28º	20	20	60	120	M85×1	Fig.5	113
STY-1064-360-525	525	606	Φ510/360×360	±28º	20	30	52	120	M85×1	Fig.2	113
STY-1064-400-580	580	657	Φ566/400×400	±28º	20	25	72	125	M85×1	Fig.6	118
STY-1064-420-590	590	650	Φ595/420×420	±28º	20	25	52	140	M95×1	Fig.2	133.5
STY-1064-430-610	610	670	Φ610/430×430	±28º	20	25	52	140	M95×1	Fig.2	133.5
STY-1064-450-650	650	736	Φ636/450×450	±28º	20	30	52	120	M85×1	Fig.2	113

F.L.=focal length; EP=entrance pupil; AD=aperture distance; FD=flange distance; WD=working distance.
spot: it is theoretical optical limit.

Standard ƒ-Theta Lenses at 1064nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0063/126	63.03	23.80	51.44	36x36	8.00	15.00	35.63	59.20	M39x1 or M55x1	74.54	Yes
STS-0101/126	100.12	22.00	76.88	55x55	10.00	18.00	40.00	90.00	M85x1	111.98	Yes
STS-0162/126	159.97	24.80	141.76	100x100	8.00	15.00	25.22	59.20	M39x1 or M55x1	179.93	Yes
STS-0163/126	162.41	26.80	153.84	107x107	12.00	22.00	43.30	89.00	M85x1	181.08	Yes
STS-3163/126	163.00	31.80	181.13	120x120	15.00	22.88	51.99	103.00	M85x1	186.61	Yes
STS-2163/126	163.00	27.80	158.07	106x106	20.00	29.00	66.00	128.00	M85x1	192.66	Yes
STS-0191/126	191.87	26.80	180.35	125x125	20.00	40.00	57.85	128.00	3.875“x32	220.88	Yes
STS-0202/126	201.58	19.00	132.62	90x90	30.00	43.00	84.10	132.00	M85x1	243.05	Yes
STS-3254/126	253.94	19.20	170.72	115x115	30.00	48.94	75.50	130.00	M85x1	297.18	Yes
STS-4255/126	254.00	27.20	242.88	168x168	20.00	38.00	70.06	130.00	M85x1	292.70	Yes
STS-1254/126	254.38	25.60	226.91	160x160	12.00	23.50	55.30	109.00	M85x1	306.26	Yes
STS-0300/126	300.02	25.00	261.46	175x175	20.00	35.00	78.00	128.00	M85x1	353.09	Yes
STS-0350/126	346.26	25.20	304.96	212x212	12.00	22.48	52.40	95.00	M85x1	412.17	Yes
STS-0351/126	354.10	19.60	245.87	160x160	30.00	53.50	48.50	128.00	3.875“x32	396.25	Yes
STS-0411/126	409.86	21.00	304.06	210x210	20.00	44.00	56.80	105.00	M85x1	472.77	Yes
STS-0420/126	419.98	23.60	353.53	242x242	30.00	59.45	52.00	136.00	M132x1	480.14	---
STS-0508/126	566.34	23.20	467.21	325x325	20.00	45.00	56.90	127.00	M85x1	647.59	---
STS-0635/126	653.81	22.60	528.66	370x370	25.00	75.00	48.50	133.00	M110x1	728.99	---
STS-0825/126	815.01	27.20	804.50	560x560	24.00	43.24	58.00	130.00	M102x1	888.52	Yes

Remark: FL=focal length; SA=scan angle; SL=scan length; SAR=scan area; MI=max. input beam diameter; AS=aperture stop; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Telecentric ƒ-Theta Lenses at 1064nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0058/126	56.55	11.80	23.22	16x16	10.00	26.44	40.68	90.00	M85x1	58.43	Yes
STS-0055/126	59.69	13.60	27.94	19x19	14.00	20.10	58.00	90.00	M85x1	66.55	---
STS-0080/126	79.89	21.50	58.54	39x39	25.00	27.16	84.14	107.00	M85x1	79.45	Yes
STS-6125/126	99.25	17.60	59.86	40x40	25.00	37.36	80.40	116.00	M85x1	114.89	Yes
STS-5100/126	107.74	26.80	97.48	69x69	12.00	34.87	85.50	128.00	M85x1	137.86	Yes
STS-5365/126	162.90	19.00	106.07	73x73	20.00	61.50	114.96	154.00	M85x1	194.83	Yes
STS-5165/126	163.57	19.00	106.91	75x75	10.00	58.30	128.50	136.00	M85x1	193.54	Yes
STS-0220/126	206.71	28.40	197.38	139x139	14.00	46.00	160.00	281.00	TK267.0	289.49	---
STS-0221/126	206.71	28.40	197.38	139x139	14.00	46.00	176.68	281.00	TK267.0	274.53	Yes

Standard Fused Silica ƒ-Theta Lenses at 1064nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-2175/126	163.35	25.00	137.11	94x94	20.00	30.50	110.24	150.00	M85x1	205.47	Yes
STS-3260/126	277.11	21.40	205.60	142x142	15.00	31.00	61.00	105.00	M85x1	346.07	Yes
STS-1330/126	340.00	24.40	306.60	215x215	20.00	38.50	174.60	163.00	M85x1	204.04	Yes
STS-1500/126	499.97	27.40	493.71	340x340	20.00	30.50	68.00	148.00	M85x1	571.26	Yes

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Fused Silica ƒ-Theta Lenses (Low Absorption) at 1064nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-2175/328	163.35	25.00	137.11	94x94	20.00	30.50	110.24	150.00	M85x1	205.47	Yes
STS-3260/328	277.11	21.40	205.60	142x142	15.00	31.00	61.00	105.00	M85x1	346.07	Yes
STS-1330/328	340.00	24.40	306.60	215x215	20.00	38.50	174.60	163.00	M85x1	204.04	Yes
STS-1500/328	499.97	27.40	493.71	340x340	20.00	30.50	68.00	148.00	M85x1	571.26	Yes

Standard Telecentric ƒ-Theta Lenses - Fused Silica at 1064nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-4031/126

32.78

8.00

9.11

6x6

10.00

16.50

39.85

90.00

M85x1

28.67

----

STS-0082/126

82.00

10.00

28.35

20x20

15.00

33.00

103.14

93.80

M85x1

84.59

Yes

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Telecentric ƒ-Theta Lenses - Fused Silica (Low Absorption) at 1064nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-4031/328

32.78

8.00

9.11

6x6

10.00

16.50

39.85

90.00

M85x1

28.67

----

STS-0082/328

82.00

10.00

28.35

20x20

15.00

33.00

103.14

93.80

M85x1

84.59

Yes

Short Pulse Laser ƒ-Theta Lenses at 1064nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-7163

163.03

24.40

138.06

95x95

10.00

27.00

44.00

89.00

M85x1

197.07

Yes

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

(2) 532nm Scan Lenses

Model	F.L. mm	WD mm	Scan area mm	Scan Angle θmax	E.P. mm	Spot µm	D1 mm	D2 mm	Screw	Out- line
STY-532-35-63	63	58	Φ50/35x35	±22º	12	10	31	90	M85×1	Fig.1
STY-532-50-80	80	91.6	Φ70/50×50	±22º	12	12	31	90	M85×1	Fig.1
STY-532-62-100	100	107	Φ87/62×62	±25º	12	14	33	90	M85×1	Fig.1
STY-532-74-120	120	132	Φ105/74×74	±25º	12	14	35	90	M85×1	Fig.1
STY-532-110-160	160	180	Φ155/110×110	±28º	16	15	36	90	M85×1	Fig.1

F.L.=focal length; EP=entrance pupil; AD=aperture distance; FD=flange distance; WD=working distance.
spot: it is theoretical optical limit.

Part No.	EFL (mm)	Scan Angle (±°)	Scan Length (mm)	Scan Field (mm)	Ent. pupil (mm)	Average spot size (um)	Length (mm)	WD (mm)	Screw Thread
STY-532-70-100-WT	100	25°	87.0	70x70	14.0	12.0	50.0	100.0	M85x1
STY-532-90-120-WT	120	25°	102.0	90x90	8.0	10.8	38.85	134.0	M85x1
STY-532-100-162-WT	162	23°	132.9	100x100	7.0	-	25.2	183.4	M39/M55
STY-532-115-165-WT	165	20°	163.0	115x115	10.0	18.5	48.0	186.0	M85x1
STY-532-148-233-WT	234	26°	211.0	148x148	10.0	-	55.3	282.0	M85x1
STY-532-150-254-WT	254	25°	220.0	150x150	10.0	21.5	51.0	280.0	M85x1
STY-532-225-410-WT	410	25°	366.0	225x225	15.0	15.0	48.94	443.7	M85x1
STY-532-350-508-WT	508	25°	500.0	350x350	16.0	15.0	57.0	581.0	M85x1
STY-532-510-740-WT	740	20°	721.0	510x510	16.0	18.5	65.0	896.5	M85x1
STY-532-550-768-WT	768	28°	710.0	550x550	16.0	24.0	58.0	839.0	M102x1

(3) 355nm Scan Lenses

Model	F.L. mm	WD mm	Scan area mm (round/square)	Scan Angle maxi	E.P. mm	Spot µm	D1 mm	D2 mm	Screw	Out-line
STY-355-70-100	100	122	Φ100/70×70	±25º	8	12	33	90	M85×1	Fig.3
STY-355-110-160	160	185	Φ155/110×110	±25º	8	15	33	90	M85×1	Fig.1
STY-355-110-160-B	160	187	Φ155/110×110	±25º	8	15	33	90	M85×1	Fig.4

Part No.	EFL (mm)	Scan Angle (±°)	Scan Length (mm)	Scan Field (mm)	Ent. pupil (mm)	Average spot Size (um)	Length (mm)	Working Distance (mm)
STY-355-60-100-WT	100.0	25°	85.0	60x60	6.0	15.5	56.0	130.5
STY-355-76-108-WT	108.3	28.4°	107.7	76x76	6.0	-	49.0	146.0
STY-355-109-174-WT	173.9	25°	153.2	109x109	6.0	-	36.8	218.4
STY-355-112-160-WT	160.0	20°	158.0	112x112	7.0	13.5	50.0	177.79
STY-355-112-160Q-WT	160.0	29°	160.0	112x112	6.0	18	50.36	206.6
STY-355-155-250-WT	250.3	25.4°	219.2	155x155	10.0	-	61.0	309.6
STY-355-160-254-WT	254.0	25°	220.0	160x160	12.0	22.0	55.0	311.0
STY-355-130-269-WT	269.3	19.0°	183.0	130x130	4.0	-	47.0	276.1
STY-355-180-290-WT	290.0	25.5°	255.0	180x180	20.0	40.0	65.0	332.5
STY-355-250-410-WT	410.0	25.°	354.0	250x250	10.0	7.0	46.8	488.2
STY-355-320-580-WT	580.0	22°	455.0	320x320	10.0	27.0	38.0	668.0
STY-355-350-580-WT	580.0	25°	495.0	350x350	15.0	24.0	46.0	689.0
STY-355-500-810-WT	810.0	28°	850.0	500x500	24.0	55.0	57.0	880.0
STY-355-440-831-WT	831.1	21.4°	624.5	440x440	14.0	-	62.5	983.2
STY-355-470-912-WT	919.2	20.8°	678.0	470x470	14.0	-	40.0	1032.0

Standard ƒ-Theta Lenses at 355nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-3100/075	108.34	28.40	107.70	76x76	6.00	17.14	49.00	89	M85x1	145.95	Yes
STS-3160/075	173.90	25.00	153.15	109x109	6.00	21.10	36.75	89	M85x1	218.40	Yes
STS-3260/075	250.26	25.40	219.17	155x155	10.00	28.05	61.00	105	M85x1	309.62	Yes
STS-0257/075	269.29	19.00	183.00	130x130	4.00	13.50	47.00	900	M85x1	276.08	---
STS-1330/075	328.18	25.20	303.39	212x212	14.00	36.00	108.4	1220	M85x1	260.21	Yes
STS-0580/075	580.80	22.00	455.60	320x320	10.00	39.00	37.96	890	M85x1	671.66	Yes
STS-0815/075	831.05	21.40	624.49	440x440	14.00	25.00	62.50	900	M85x1	983.23	Yes
STS-0920/075	919.21	20.80	678.02	470x470	14.00	40.97	40.00	89	M85x1	1032.00	Yes

Telecentric ƒ-Theta Lenses at 355nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-4031/075	32.04	8.00	8.90	6x6	10.00	16.50	39.85	90	M85x1	28.99	----
STS-3050/075	56.01	15.20	29.35	20x20	6.00	19.50	39.79	87	M85x1	75.89	Yes
STS-4110/075	109.38	24.20	89.79	63x63	6.00	33.07	86.00	121	M85x1	154.57	Yes
STS-4160/075	167.22	15.60	90.05	64x64	10.00	37.20	133.00	121	M85x1	264.36	Yes
STS-5256/075	256.82	14.60	124.46	86x86	6.00	24.00	173.50	138	M85x1	145.16	----

(4) Wavelength 266nm

Standard ƒ-Theta Lenses at 266nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-3100/199	101.49	29.20	100.68	73x73	5.00	17.14	49.00	89.00	M85x1	136.52	Yes
STS-3160/199	162.31	25.00	142.66	105x105	5.00	21.10	36.75	89.00	M85x1	204.47	Yes
STS-0256/199	249.50	24.20	218.90	148x148	4.00	13.50	47.00	90.00	M85x1	254.00	----

Telecentric ƒ-Theta Lenses at 266nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-4030/199	30.10	14.60	15.00	10x10	6.00	12.72	55.54	47	M85x1	28.90	Yes
STS-3050/199	53.46	16.00	29.40	20x20	6.00	17.80	39.79	87	M85x1	71.70	----
STS-4105/199	99.30	21.00	72.08	50x50	5.00	26.90	86.20	121	M85x1	142.17	Yes
STS-4162/199	159.78	16.20	90.27	64x64	10.00	32.30	133.00	121	M85x1	253.67	Yes

Part No.	EFL (mm)	Scan Angle (±°)	Scan Length (mm)	Scan Field (mm)	Ent. pupil (mm)	Average spot Size (um)	Length (mm)	Working Distance (mm)
STY-266-70-100-WT	100.0	28°	95.0	70x70	5.0	8.0	49.0	137.0
STY-266-110-160-WT	160.0	28°	160.0	110x110	5.0	10.0	36.7	200.0
STY-266-90-254-WT	254.0	18°	156.0	90x90	4.0	16.0	47.0	25.0

Scan Lenses for other Wavelengths

Standard ƒ-Theta Lenses for 808nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0101/094	97.53	28.00	75.71	53x53	10	18.00	40.00	90.00	M85x1	108.90	Yes
STS-0163/094	158.28	27.60	156.21	108x108	12	20.80	43.30	89.00	M85x1	176.42	Yes
STS-2163/094	158.88	26.80	150.05	103x103	20	29.00	66.00	128.00	M85x1	187.26	Yes
STS-0202/094	196.85	19.00	130.88	90x90	30	43.00	83.10	132.00	M85x1	237.41	Yes
STS-3254/094	248.66	19.20	168.83	115x115	30	47.93	75.50	130.00	M85x1	290.03	Yes
STS-0300/094	294.17	25.00	258.39	175x175	20	35.00	78.00	128.00	M85x1	346.21	Yes
STS-0400/094	397.87	21.40	303.07	213x213	20	33.00	53.00	118.00	M85x1	486.87	---
STS-0420/094	410.93	25.20	374.59	250x250	30	54.64	52.00	136.00	M132x1	468.59	---
STS-0555/094	556.24	21.40	426.26	290x290	25	40.00	65.40	130.00	M85x1	628.87	---
STS-0635/094	636.51	25.60	594.02	415x415	30	58.25	48.50	133.00	M110x1	709.51	---
STS-0825/094	803.55	28.00	642.68	450x450	30	54.00	58.00	130.00	M102x1	875.96	Yes

Telecentric ƒ-Theta Lenses for 808nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0053/094	56.33	11.00	21.61	14x14	10.00	17.50	55.15	90.00	M85x1	69.12	Yes
STS-0075/094	76.78	9.80	26.40	19x19	10.00	32.60	45.00	70.00	TK60	103.63	---
STS-0080/094	79.55	21.20	58.15	39x39	25.00	27.70	83.40	107.00	M85x1	79.53	Yes
STS-5100/094	105.63	26.80	96.39	68x68	12.00	35.00	85.50	126.00	M85x1	135.25	Yes

Standard ƒ-Theta Lenses for 980nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0101/094	99.46	28.00	75.71	53x53	10.00	18.00	40.00	90.00	M85x1	111.17	Yes
STS-0163/094	161.38	27.60	156.21	108x108	12.00	20.80	43.30	89.00	M85x1	179.88	Yes
STS-2163/094	162.00	26.80	150.05	103x103	20.00	29.00	66.00	128.00	M85x1	191.26	Yes
STS-0202/094	200.40	19.00	130.88	90x90	30.00	43.00	83.10	132.00	M85x1	241.65	Yes
STS-3254/094	253.12	19.20	168.83	115x115	30.00	47.93	75.50	130.00	M85x1	295.61	Yes
STS-0300/094	298.52	25.00	258.39	175x175	20.00	35.00	78.00	128.00	M85x1	351.32	Yes
STS-0400/094	400.16	21.40	303.07	213x213	20.00	33.00	53.00	118.00	M85x1	489.16	---
STS-0420/094	419.58	25.20	374.59	250x250	30.00	54.64	52.00	136.00	M132x1	478.65	---
STS-0555/094	565.20	21.40	426.26	290x290	25.00	40.00	65.40	130.00	M85x1	638.85	---
STS-0635/094	649.59	25.60	594.02	415x415	30.00	58.25	48.50	133.00	M110x1	724.17	---
STS-0825/094	812.18	28.00	642.68	450x450	30.00	54.00	58.00	130.00	M102x1	885.11	Yes

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Telecentric ƒ-Theta Lenses for 980nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-0053/094	57.39	11.00	21.61	14x14	10	17.50	55.15	90.00	M85x1	70.56	Yes
STS-0075/094	78.18	9.80	26.40	19x19	10	32.60	45.00	70.00	TK60	105.56	---
STS-0080/094	80.96	21.20	58.15	39x39	25	27.70	83.40	107	M85x1	81.30	Yes
STS-5100/094	107.19	26.80	96.39	68x68	12	35.00	85.50	126	M85x1	137.17	Yes

Standard ƒ-Theta Lenses at 633nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-0155/123

154.63

11.00

59.28

40x40

15.00

40.00

50.00

70.00

No thread

192.00

Standard ƒ-Theta Lenses at 633nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)
STS-0075/123	74.79	10.40	27.00	19X19	10.00	31.00	45.00	70.00	No thread	100.30
STS-1088/093	87.48	15.80	48.22	34X34	7.00	34.00	55.00	98.00	TK87	116.61
STS-0093/123	89.02	17.00	51.96	36X36	16.00	34.00	62.05	83.00	No thread	113.37
STS-1100/123	100.59	12.00	42.16	30X30	10.00	53.30	92.00	155.00	TK145	221.34
S4FLT1114/093	156.06	20.00	108.80	77X77	10.00	53.30	92.00	155.00	TK145	223.27
STS-0200/123	203.55	15.00	105.79	75X75	20.00	116.50	93.95	142.00	TK133	235.97

Standard ƒ-Theta Lenses at 670nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)
STS-1088/093	87.96	15.80	48.50	34X34	7.00	34.40	55.00	98.00	TK87	116.27
STS-1114/093	157.32	20.00	109.65	77X77	10.00	53.30	92.00	155.00	TK145	223.00
STS-040/093	157.47	19.60	107.73	76X76	5.00	53.40	90.00	155.00	TK145	225.22

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Colour Corrected ƒ-Theta Lenses AT 808+940 nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-8163

162.95

26.40

150.67

102X102

20.00

22.00

90.50

106

M86X1

153.63

Yes

Telecentric Colour Corrected ƒ-Theta Lenses at 450-650nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-0061/065

60.52

15.00

31.81

22X22

5.00

25.60

48.50

59.00

TK52

75.61

Telecentric Colour Corrected ƒ-Theta Lenses at 405-650nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-4375

80.00

11.00

20.00

14X14

6.00

95.10

88.00

59.00

TK52

22.50

Standard ƒ-Theta Lenses at 405nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-3160/173	175.86	25	154.76	110x110	6.00	21.10	36.75	89	M85x1	220.73	Yes
STS-0375/173	375.32	31	420.36	300x300	10.00	35.50	48.00	116	M92x1	447.46	----
STS-0580/173	594.12	22	466.36	326x326	10.00	39.00	37.96	89	M85x1	686.46	Yes

Telecentric ƒ-Theta Lenses at 405nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-8050/173

55.03

22.80

42.10

29x29

7.50

16.20

52.00

90.00

M85x1

67.20

----

ƒ-Theta Lens for Mask Imaging for Excimer Laser at 248nm

Part No.

(mm)

(±°)

Magnification

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-4200/198

221.10

14.00

0.33

200X200

10X10

38.6

M85x1

303.60

Remark: FL=focal length; SA=scan angle; SAR=scan area; MI=max. input beam diameter; MO=max. outside diameter; MT=mounting thread; WD=working distance; PW=protective windows.

Standard ƒ-Theta Lenses for Excimer Laser at 193nm

Part No.

(mm)

(±°)

(mm)

SAR

(mm x mm)

(mm)

Length (mm)

(mm)

STS-4056/198

18.8

25X25

M85X1

71.36

Yes

STS-4057/198

66.24

19.2

30X30

M85X1

83.78

Yes

Standard ƒ-Theta Lenses at 1550nm

Part No.	FL (mm)	SA (±°)	SL (mm)	SAR (mm x mm)	MI (mm)	AS (mm)	Length (mm)	MO (mm)	MT	WD (mm)	PW
STS-3100/008	100.1	22.0	76.9	55x55	10.0	18.0	40.0	90.0	M85	112.0	Yes
STS-2250/008	277.1	21.4	205.6	142x142	15.0	31.0	61.0	105.0	M85	346.1	Yes
STS-5163/008	163.1	18.8	104.0	73x73	15.0	32.2	183.32	135.0	M85	155.4	Yes

Model

F.L.

Scan area

Scan Angle

θmax

E.P.

Spot

µm

Screw

Outline

STY-1550-110-160

160

180

Φ155/110×110

±28º

M85×1

Fig. 1

Scan Mirrors Optical Scanners (galvanometers) Reference: Basics of Scan Lens