Excimer Lasers
　

We are the leading manufacturer of lasers for medicine, science and technology in Russia. The product line includes excimer lasers, CO2 and N2 lasers, DPSS lasers, medical laser systems, lidars, high voltage power supplies and magnetometers.

 

The company is the only Russian manufacturer of ophthalmologic excimer laser system for refractive surgery. Company’s latest development in the field of medical equipment is an excimer laser system for therapy of skin diseases (psoriasis).

 

The company is the major supplier of excimer lasers and high voltage power supplies to R&D institutes and companies - integrators of technological laser systems for various purposes.

 

The company also develops and manufactures systems for laser deposition, microdrilling and micromachining and exclusive for the Russian market systems for plasma-chemical deposition of micro- and nano-crystalline diamond coatings and films.

 

1. CL5000 Series Excimer Lasers

 

Applications:

  • Spectroscopy

  • Fiber Bragg grating

  • Material micro processing

  • Micro marking

  • Pulsed laser deposition

 

Technical characteristics

  • compact excimer laser

  • power stabilization

  • extended gas lifetime

  • computer control

  • single unit design

  • premix gases

 

 

ArF

KrF

XeCl

Wavelength*

193 nm

248 nm

308 nm

Tube material

Ceramic

Preionization

corona

Nominal Pulse Energy

20 mJ

40 mJ

25 mJ

Average Power
CL 5100
CL 5200
CL 5300

 

2 W
4 W
5 W

 

4 W
7 W
10 W

 

2.5 W
4.5 W
6.5 W

Max repetition rate
CL 5100
CL 5200
CL 5300

 

100 Hz
200 Hz
300 Hz

Pulse Duration2

8-10 ns

9-11 ns

Stability of pulse energy

sigma < 2%

Beam Size1

5 x 12 mm

6 x 12 mm

Beam Divergency1

2 x 4 mrad (stable resonator)

Time jitter

< 2 ns

Window service interval, pulses2

150 mio

200 mio

300 mio

Dimensions, (weight)

800L x 330W x 571H мм (80 kg)

Cooling
CL 5100
CL 5200/5300

 

air
water < 1 liter/min

Power

220V / 50Hz, 10А, not more than 1000 VA

Gas

1 premix cylinder

Control

RS 232, DOS/Windows

* - it is possible to work on 157 nm

1 - FW HM

2 - laser works at nominal energy

 

Main software panel                 

 

Outline drawing

　

2. CL-7000 Series Excimer Lasers

 

Applications:

  • Spectroscopy

  • Fiber Bragg grating

  • Material micro processing

  • Micro marking

  • Pulsed laser deposition

 

Technical characteristics

  • compact excimer laser

  • power stabilization

  • extended gas lifetime

  • computer control

  • single unit design

  • premix gases

 

 

ArF

KrF

XeCl

Wavelength*

193 nm

248 nm

308 nm

Tube material

Ceramic

Preionization

Spark

Nominal Pulse Energy

250 mJ

400 mJ

300 mJ

Average Power
CL 7020
CL 7050
CL 7100

 

5 W
10 W
20 W

 

10 W
20 W
35 W

 

6 W
15 W
25 W

Max repetition rate
CL 7020
CL 7050
CL 7100

 

20 Hz
50 Hz
100 Hz

Pulse Duration1

17 ns

20 ns

20 ns

Stability of pulse energy

sigma < 2%

Beam Size1

6 x 20 mm

6 x 21 mm

7 x 22 mm

Beam Divergency1

1.5 x 4.5 mrad (stable resonator)

Time jitter

< 2 ns

Window service interval, pulses2

50 mio

100 mio

200 mio

Dimensions, (weight)

1350L x 375W x 710H mm (170 kg)

Cooling
CL 7020
CL 7050
CL 7100

 

air
water < 1 liter/min
water < 3 liter/min

Power
CL 7020
CL 7050
CL 7100

 

220V / 50Hz, 10А, not more than 1500 VA
220V / 50Hz, 10А, not more than 1800 VA
380/220V, 50Hz, 10А, not more than 3500 VA

Gas

1 premix cylinder

Control

RS 232, DOS/Windows

* - it is possible to work on 157 nm

1 - FW HM

2 - laser works at nominal energy

　

Main software panel   

　

 

Outline drawing


　

3. CL-7500 Series Excimer Lasers

 

Applications:

  • LIF-spectroscopy

  • High resolution micro processing

 

Technical characteristics

  • consists of two excimer lasers Model 7020 or 7050, special optical kit and synchronizer

  • can operates in two color modes; all various "generator-amplifier" combinations are available

 

Specifications

Wavelength, nm

248

308

Pulse energy, mJ

200

100

Max repetition rate, Hz

20 or 50

Linewidth, nm

< 0.003

 

 

4. CL-7000K Series Excimer Lasers

 

Applications:

  • Material micro processing

  • Micro marking

  • Pulsed laser deposition

 

Technical characteristics

  • Max repetition rate 1kHz

  • ceramic discharge chamber

  • power stabilization

  • extended gas lifetime

  • extended optics lifetime

  • computer control

  • quick optics replacement

  • single unit design

  • oil free vacuum pump

  • premix gas vessels

 

Wavelength

193 nm

248 nm

Tube material

Ceramic

Preionization

Spark

Nominal Pulse Energy

24 mJ

40 mJ

Average Power

24 W

40 W

Max repetition rate

1000 Hz

Pulse Duration (FWHM)

14 ns

20 ns

Stability of pulse energy

sigma < 2%

Time Stability

± 2 ns

Beam Size (FWHM)

5 x 16 mm

Window service interval, pulses

300 mio

500 mio

Cooling

water < 1 liter/min

Gas

1 premix cylinder

Control

RS 232, DOS/Windows

Power Consumption

4.5 kW

Dimensions, (weight)

1350L x 375W x 710H mm (170 kg)

　

Energy/Power vs Repetition Rate

 

 

Distribution of laser beam intensity

 

Outline drawing